Polycrystalline silicon melting directional solidification furnace (DSS)
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Model: ZT-270D
1. Product use This product can be heated and smelted under vacuum or protective atmosphere, using graphite resistance heating, crucible furnace bottom entry and exit, reducing the operating height, suitable for directional solidification (DSS) of polycrystalline silicon raw materials, the goal is to achieve mass production.
2. Main technical parameters
1. Total installed power: ~ 240KVA
2. Rated power: 200KW
3. Productivity: 250Kg / furnace-270kg / furnace (according to the actual use of the crucible by the customer)
4. Rated temperature: 1600 ℃
5. Control mode: SCR power adjustment + high current transformer
6. Temperature control accuracy: ± 1 ℃
7. Crucible size: ï¿ 990 × 400
8. Graphite heating zone size: Ф1180 × 550
9. Maximum displacement of heating element: 800mm (tentative)
10. Ultimate vacuum: ≤1Pa
11. Moving speed of heating element: 1-25mm / hour (servo control)
3. Structure description
Vertical furnace body is adopted, which is composed of furnace body, graphite heating body and insulation layer, graphite material table and furnace bottom lifting mechanism, operation platform, inflation system, power supply and control system, vacuum system, etc.
